SYMPOSIA PAPER Published: 01 January 1974

SRPROF, A Fast and Simple Program for Analyzing Spreading Resistance Profile Data


The spreading resistance technique is an excellent method of measuring epitaxial resistivity profiles. In many cases it is the only method by which the complete profile may be measured. However, thin film correction factors must be used to convert the spreading resistance into a corrected resistivity. Previous calculations of these correction factors have emphasized a mathematically complex solution which necessitates the use of a large computer. The correction factors used here are calculated from a relatively simple algorithm which allows the use of a minicomputer. A documented program is presented which uses these algorithms. This program, written in FOCAL for use on the PDP8 series of minicomputers, is fast, accurate, easy to use, and provides a complete data reduction system. Examples of corrected spreading resistance profiles are presented, and compared with independent results such as diode C-V and four point probe measurements.

Author Information

Morris, B., L.
Bell Telephone Laboratories, Incorporated, Allentown, Pennsylvania
Langer, P., H.
White, J., C.
Western Electric Company, Allentown, Pennsylvania
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Developed by Committee: F01
Pages: 63–74
DOI: 10.1520/STP47395S
ISBN-EB: 978-0-8031-6938-8
ISBN-13: 978-0-8031-6661-5