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    Two-Point Probe Correction Factors

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    The effects of sample boundaries on resistivity measurements made with a two-point spreading resistance probe are calculated for various boundary conditions. The results are presented in the form of dimensionless correction factors. The problem of depth-dependent resistivity in a thin layer is considered, and a method for correcting measurements on such layers is described.


    Boundary correction, calculations, electrostatic analogue, resistivity, semiconductor, spreading resistance

    Author Information:

    Dickey, D. H.
    Bell and Howell Research Laboratory, Pasadena, California

    Committee/Subcommittee: F01.15

    DOI: 10.1520/STP47393S