Energy Dispersion X Ray Analysis with Electron and Isotope Excitation

SEDL / STP / STP485-EB / STP38570S

Energy Dispersion X-Ray Analysis with Electron and Isotope Excitation

Sandborg, AO
Vice president of research, Nuclear Diodes, Inc., Prairie View, Ill.

Pages: 12 Published: Jan 1971

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Abstract

The components of the energy dispersion X-ray analysis system are discussed, and the electronic noise of peak broadening due to each is identified. Data on count rates and sensitivity are listed for various elements to enable the prospective user to determine whether the technique is applicable to his specimens. Specific comparison is made between the use of electron beams, radioactive isotopes, and X-ray tubes to excite the characteristic X-ray lines of interest. The ability to distinguish small peaks when Bremsstrahlung (white radiation) is present due to the use of direct electron excitation, or when scattering of incident X-rays or gamma rays occurs is discussed.

Keywords:
dispersing, X-ray analysis, X-ray fluorescence, electron probes, scanning electron microscopy, transmission electron microscopy, electron beams, radioactive isotopes, X-ray tubes, X-ray spectra, electronic noise, semiconductor devices, silicon, field effect transistors

Paper ID: STP38570S
Committee/Subcommittee: E04.11
DOI: 10.1520/STP38570S

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