STP Published: 1983

Silicon Processing

Editor(s): D C Gupta

The 38 papers that comprise this book's contents emphasize day-to-day problems in silicon processing from its simplest use through advanced and emerging applications to very large scale integration circuits. The problem areas and standardization needs identified in the papers presented will provide feedback to the research community concerning the future growth of the industry.

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Developed by Committee: E47
Pages: 559
DOI: 10.1520/STP804-EB
ISBN-EB: 978-0-8031-4871-0
ISBN-13: 978-0-8031-0243-9