SYMPOSIA PAPER Published: 01 January 1984
STP32666S

Simultaneous Determination of the Boron and Phosphorus Content in Silicate Glasses by FT-IR Spectroscopy

Source

Fourier transform infrared spectroscopy can be used for the rapid determination of the boron and phosphorus concentrations in borophosphosilicate glass films. A multicomponent matrix algebraic method is used in this procedure. Results of the measurements on a number of BPSG samples are presented and the factors affecting the accuracies of the measurements are discussed.

Author Information

Krishnan, K
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Details
Developed by Committee: F01
Pages: 358–363
DOI: 10.1520/STP32666S
ISBN-EB: 978-0-8031-4915-1
ISBN-13: 978-0-8031-0403-7