SYMPOSIA PAPER Published: 01 January 1985

Alumina/Silica Multilayer Coatings for Excimer Lasers


The coating parameter that most strongly influences optical damage resistance is the choice of materials used to produce a component. During the course of testing of hundreds of ultraviolet reflectors involving 12 different material combinations, multilayer stacks of Al2O3/SiO2 have demonstrated a superior ability to resist laser-induced damage. Further, damage thresholds for these coatings are at least twice as high as for reflectors composed of other materials: In particular, thresholds of 6 J/cm2 at 248 nm (15 ns) and 12 J/cm2 at 351 nm (12 ns) have been measured. Comparative results are presented for a variety of materials at both wavelengths as are preliminary results for alumina-based antireflective coatings.

Author Information

Foltyn, SR
Jolin, LJ
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Developed by Committee: F01
Pages: 354–359
DOI: 10.1520/STP28989S
ISBN-EB: 978-0-8031-4956-4
ISBN-13: 978-0-8031-0930-8