SYMPOSIA PAPER Published: 01 January 1985

Phase Shift Variations on HEL Mirrors


An automated IR ellipsometer was used to measure the ellipsometric parameters, ψ and Δ, on multilayer mirrors at 3.80 μm. Spatial variations in differential phase shift, Δ, are modeled by thickness variations in the multilayer coating and variations in ψ are modeled by an absorption change.

Author Information

Leonard, TA
Loomis, JS
Price: $25.00
Contact Sales
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Developed by Committee: F01
Pages: 322–328
DOI: 10.1520/STP28985S
ISBN-EB: 978-0-8031-4956-4
ISBN-13: 978-0-8031-0930-8