SYMPOSIA PAPER Published: 01 January 1985

Comparison of Optical Coatings Deposited by Novel Physical and Chemical Techniques


We have undertaken a systematic study of various methods of depositing good quality thin films of optically interesting materials by different physical and chemical methods in an effort to identify promising techniques for producing low-absorbing, low-scatter, high damage-threshold coatings. The deposition methods studied include e-beam deposition in a UHV environment, sol-gel processes utilizing hot isostatic pressing (HIP) to densify the films, photochemical deposition using organometallic reagents entrained in inert or potentially reactive gas flows, and ion-beam deposition in a reactive environment. The deposited single-layer films were analyzed using various surface analysis techniques to provide information on film composition, stoichiometry, and impurity level.

Author Information

Wodarczyk, FJ
Strauss, DR
Harker, AB
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Developed by Committee: F01
Pages: 292–301
DOI: 10.1520/STP28981S
ISBN-EB: 978-0-8031-4956-4
ISBN-13: 978-0-8031-0930-8