SYMPOSIA PAPER Published: 01 January 1985

Development of RF-Sputtered Laser Coatings at Burleigh Northwest


Complex dielectric coatings, with up to forty-three layers have been deposited using RF diode sputtering techniques. Deposition parameters have been established for ZrO2, SiO2 and Al2O3. Fabrication consistency has been high in both material properties and spectral response, and the coatings have shown useful damage, loss and environmental attributes, for laser applications, in the realms so far investigated.

Author Information

Lunt, DLJ
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Developed by Committee: F01
Pages: 287–291
DOI: 10.1520/STP28980S
ISBN-EB: 978-0-8031-4956-4
ISBN-13: 978-0-8031-0930-8