SYMPOSIA PAPER Published: 01 January 1990

An Error Analysis of the Wyko TOPO Noncontact Surface Profiler


An increasingly important tool in the characterization and measurement of optical materials and components in the Wyko TOPO Noncontact Surface Profiler. Optically, it consists of a low- to medium-power microscope in which the objective, depending upon the power, is a visible light interferometer of either Michelson, Mireau, or Linnik design. By integrating a detector array into the viewing system and attaching the reference arm of the interferometer to a piezoelectric transducer, the technique of surface profiling by phase shifting is accomplished by computer.

The potential utility of this system to the investigator interested in the fundamental mechanisms of laser-induced damage is enormous, provided that the user is aware of its proper use and limitations. This paper is intended to act as a user's guide to the TOPO system in such cases and to document its precision and accuracy limitations given a variety of surface types and measurement configurations.

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Hodgkin, VA
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Developed by Committee: E13
Pages: 254–254
DOI: 10.1520/STP26492S
ISBN-EB: 978-0-8031-5157-4
ISBN-13: 978-0-8031-4478-1