SYMPOSIA PAPER Published: 01 January 1988

Selected Protective Clothing for Semiconductor Manufacture


State-of-the-art technologies in the semiconductor industry require exotic processing techniques using unusual, hazardous chemicals. The very nature of some of these chamicals makes it necessary to very carefully select protective clothing to assure the protection of the worker.

Selection techniques are described for safety glasses, side shields, goggles, visitors' goggles, face shields; ear protection; respirators, in-line air breathing equipment, self-contained breathing apparatus; gloves—acid, solvent and heat-resistant as well as disposable types; oversleeves; aprons; head protection; footwear; and protective suits. Properties of materials—strength, permeability, durability, and impact resistance as well as chemical resistance—must be considered. Finally, recommendations for personal protective equipment to be used in the semiconductor industry are offered. Included will be an overall list of suggested equipment and possible suppliers.

Author Information

Gittelman, DH
AT&T, Reading, PA
Price: $25.00
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Developed by Committee: F23
Pages: 347–355
DOI: 10.1520/STP26301S
ISBN-EB: 978-0-8031-5058-4
ISBN-13: 978-0-8031-1167-7