SYMPOSIA PAPER Published: 01 January 1989
STP26041S

Particulate Cleanliness Testing of Filters and Equipment in Process Fluids

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Filters and equipment components used in critical semiconductor process lines must be accurately evaluated for particulate cleanliness. This requires accurate test methods, particle counting instruments, testing apparati, and careful analysis of data. This paper describes these criteria and how they can be applied.

Author Information

Goldsmith, SH
Grundelman, GP
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Details
Developed by Committee: F01
Pages: 222–229
DOI: 10.1520/STP26041S
ISBN-EB: 978-0-8031-5107-9
ISBN-13: 978-0-8031-1273-5