SYMPOSIA PAPER Published: 01 January 1989
STP26025S

The Effect of a Rotational Magnetic Field on MCZ Crystal Growing

Source

Czochralski(CZ) crystal growth under the vertical D.C. magnetic field with and without the horizontal rotating field is investigated by the numerical analysis and experiment.

The numerical analysis shows that the vertical magnetic field increases the effective segregation coefficient of phosphorus and the oxygen content of the grown crystal, and the horizontal rotating magnetic field is useful to decreases the oxygen content. This is due to the activation of convection flow in the meridional plane in the crucible by the rotating magnetic field. The experimental results of the effective segregation coefficient of phosphorus and oxygen content under the vertical magnetic field with and without horizontal rotating magnetic field verify the calculated results.

Author Information

Yamashita, K
Kobayashi, S
Aoki, T
Kawata, Y
Shiraiwa, T
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Details
Developed by Committee: F01
Pages: 7–17
DOI: 10.1520/STP26025S
ISBN-EB: 978-0-8031-5107-9
ISBN-13: 978-0-8031-1273-5