SYMPOSIA PAPER Published: 01 January 1987

Particle and Material Control Automation System for VLSI Manufacturing


This paper describes a practical automation system for integrated circuit fabrication combining the SMIF (Standard Mechanical InterFace) concept with a new approach to material control. SMIF implementation is shown to provide a cost effective clean environment and a unique opportunity for information management automation. Each SMIF port acts as a material “gateway”, controlling lot processing via data attached directly to the SMIF pod. Misprocessing is eliminated, particulate contamination is reduced, and productivity is improved.

Author Information

Brain, MD
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Developed by Committee: F01
Pages: 414–422
DOI: 10.1520/STP25780S
ISBN-EB: 978-0-8031-5021-8
ISBN-13: 978-0-8031-0459-4