SYMPOSIA PAPER Published: 01 January 1987

Some Aspects of Productivity of a Low Pressure CVD Reactor


A mathematical model of a CVD reactor is presented, from which performance criteria such as deposition uniformity, and reactor productivity, may be obtained in terms of design and operating parameters. An example is presented in which the interwafer spacing, and the number of wafers to be processed as a single batch, are determined to maximize productivity while maintaining a constraint on uniformity.

Author Information

Middleman, S
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Developed by Committee: F01
Pages: 129–136
DOI: 10.1520/STP25746S
ISBN-EB: 978-0-8031-5021-8
ISBN-13: 978-0-8031-0459-4