SYMPOSIA PAPER Published: 01 January 1987

Measurements of Cross-Contamination Levels Produced by Ion Implanters


The contamination of implants by other species previously used in the same machine has been shown to be of significant concern for high-dose implants. This paper reports the results of a survey of the contamination levels extant in high-volume production implanters. Two classes of machines are represented. The first includes machines where wafer holders have been dedicated to a particular species. The second is machines where no precautions regarding cross-contamination have been taken. The machines have different production histories, especially for different species, and it is felt that the range of contamination levels reported is typical of what might be seen.

Author Information

Larson, LA
Kirby, BJ
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Developed by Committee: F01
Pages: 119–128
DOI: 10.1520/STP25745S
ISBN-EB: 978-0-8031-5021-8
ISBN-13: 978-0-8031-0459-4