SYMPOSIA PAPER Published: 01 January 1978

The Physical Basis for Quantitative Surface Analysis by Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy


A review is given of the physical basis for quantitative surface analysis by Auger electron spectroscopy (AES) and by X-ray photoelectron spectroscopy (XPS) or electron spectroscopy for chemical analysis (ESCA). The principal topics discussed are: the feasibility of surface analysis, approaches to surface analysis, description of models and data for surface analysis by AES and XPS, analytical methods, intensity measurements, practical considerations, applications, and reference materials.

Author Information

Powell, CJ
U.S. Department of Commerce, National Bureau of Standards, Washington, D.C.
Price: $25.00
Contact Sales
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Developed by Committee: E42
Pages: 5–30
DOI: 10.1520/STP25597S
ISBN-EB: 978-0-8031-4715-7
ISBN-13: 978-0-8031-0543-0