SYMPOSIA PAPER Published: 01 January 1988

Oxide Optical Coatings Prepared by Metal-Organic Vapor Deposition


We prepared films of alumina, zirconia and hafnia by Chemical Vapor Deposition (CVD) for evaluation as high refractive index optical components for high power laser applications. Films with high index of refraction (1.89-1.63) but with rather low single shot laser damage thresholds (4–10 J/cm-2) were prepared by high temperature (400%C) thermal decomposition. Lower temperature deposition with chemical assist improves some optical properties and laser damage thresholds at the expense of a lower index of refraction.

Author Information

Brusasco, R
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Developed by Committee: F01
Pages: 300–307
DOI: 10.1520/STP24438S
ISBN-EB: 978-0-8031-5033-1
ISBN-13: 978-0-8031-4481-1