SYMPOSIA PAPER Published: 01 January 1988

Comparative Study of Reactively Evaporated vs. Ion-Plated TiO Thin Films


Single-layer thin films of TiO2 deposited on glass substrates by means of standard reactive evaporation (from a boat) and by means of the novel deposition technique of ion-plating were characterized with a transmission electron microscope, a Raman microprobe, a thermal deflection spectrometer, and a Talystep stylus-type surface profiling instrument. With each deposition technique, single-layer coatings of different thicknesses were produced, from one QWOT up to 12 QWOT @ 633 nm). The thickness dependence of microstructure, surface roughness, and absorption for the two groups of coatings will be presented, together with laser damage threshold measurements at 532 nm.

Author Information

Guenther, KH
Loo, B
Pulker, HK
Saxer, A
Seitel, SC
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Developed by Committee: F01
Pages: 278–278
DOI: 10.1520/STP24433S
ISBN-EB: 978-0-8031-5033-1
ISBN-13: 978-0-8031-4481-1