We have coated a large silicon carbide (SiC) thin film on the graphite substrate by thermal CVD method. The surface of the SiC is first lapped and then polished with a precision ring-polisher. The roughness of super-polished SiC surface was about 5 Arms. This super-polished SiC surface is expected to be useful as a grazing incidence mirror for XUV radiation.
We have applied this SiC as a high reflectance mirror for the argon excimer laser (λ=126 nm), and obtained peak output power of more than 14 MW (MgF2 output mirror and 3 mm in beam diameter) without any damage on the SiC mirror surface. The output power and power density on the cavity mirror are the highest in comparison to the previous results obtained with other mirrors.
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