We obtained the damage-resistant crystals of potassium dihydrogen phosphate (KDP) by reducing organic impurities in the growth solution. To prevent organic impurity exuded from the wall of growth vessel, Pyrex glass was used. The residual organic impurities which mainly derived from KDP raw powder were reduced by photo-chemical dissociation using the combination of ultraviolet light and an oxidant (hydrogen peroxide). The resultant total organic carbon (TOC) of the solution was less than 0.1ppm. The damage threshold of the crystals grown from this solution were always high (20–22 J/cm2), which is about three times higher than that of crystals grown by conventional methods.
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