In order to make full use of the potential of today's high-power lasers it is desirable for numerous applications in material processing to achieve a diffraction limited intensity distribution in the focal plane. Therefore, in addition to the mode of the laser beam the properties of the optical components used for beam guiding and beam shaping are essential. Due to partial absorption of the high-power laser's radiation these components have transient optical properties. In order to investigate this behavior different experiments to evaluate the surface quality, the absorption and the optical deformation under irradiation have been performed.
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