SYMPOSIA PAPER Published: 01 January 1991
STP23660S

Excimer Laser Optics

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For optical materials, mirrors and antireflection coatings the laser damage resistance results for XeCl, KrF, ArF excimer laser wavelengths are presented.

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Details
Developed by Committee: F01
Pages: 557–564
DOI: 10.1520/STP23660S
ISBN-EB: 978-0-8031-5179-6
ISBN-13: 978-0-8194-0532-6