SYMPOSIA PAPER Published: 01 January 1989
STP22941S

Emergency Spill Control in Semiconductor Manufacture

Source

State-of-the art technologies in the semiconductor industry require the use of exotic processing techniques using unusual and hazardous chemicals. The objective of this paper is to provide a safe procedure for clean-up and disposal of emergency dry and liquid chemical spills as they relate to manufacturing shop operations. It will give detailed information on correct and proper procedures and list all the personal protective equipment required, i.e. gloves, protective sleeves, Tyvek suits, respirators, self-contained breathing apparatus. A 21-minute video tape was produced by AT&T for use in training employees in the event of emergency spill clean up.

Author Information

Hilbert, AC
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Details
Developed by Committee: F23
Pages: 167–173
DOI: 10.1520/STP22941S
ISBN-EB: 978-0-8031-5093-5
ISBN-13: 978-0-8031-1297-1