SYMPOSIA PAPER Published: 01 January 1988

Super-Polished Single Crystal Molybdenum Mirror for XUV ∼ X-Ray Radiation


High quality single crystal molybdenum (Mo) fabricated by secondary recrystallization method has been polished with a new polishing technique. The super-polished surface of the Mo single crystal has the surface roughness of 3.5Årms. THis super-polished single crystal Mo has been used for a high power electron-beam pumped argon excimer laser (λ=126nm) as a cavity mirror. Peak output power of more than 3MW has been achieved without any damage on the mirror surface for the first time.

Author Information

Yoshida, K
Takeuchi, K
Kato, Y
Fujiwara, E
Yamanaka, C
Yamashita, K
Kurosawa, K
Sasaki, W
Uehara, K
Okamoto, H
Price: $25.00
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Developed by Committee: E13
Pages: 561–567
DOI: 10.1520/STP18593S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4