SYMPOSIA PAPER Published: 01 January 1988
STP18579S

Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry

Source

Spectroscopic ellipsometric (SE) measurements followed by linear regression analysis of the SE data obtained on optically transparent thin films of ZnS and MgO on vitreous silica substrates, reveal the distribution of voids (or low density regions) in these thin films.

Author Information

Vedam, K
Kim, SY
D'Aries, L
Guenther, AH
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Details
Developed by Committee: E13
Pages: 392–396
DOI: 10.1520/STP18579S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4