SYMPOSIA PAPER Published: 01 January 1988

Nondestructive Depth Profiling of Optically Transparent Films by Spectroscopic Ellipsometry


Spectroscopic ellipsometric (SE) measurements followed by linear regression analysis of the SE data obtained on optically transparent thin films of ZnS and MgO on vitreous silica substrates, reveal the distribution of voids (or low density regions) in these thin films.

Author Information

Vedam, K
Kim, SY
D'Aries, L
Guenther, AH
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Developed by Committee: E13
Pages: 392–396
DOI: 10.1520/STP18579S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4