SYMPOSIA PAPER Published: 01 January 1988

An Investigation of Laser Processing of Thin Film Coatings


An initial set of experiments has been conducted to determine the practicality of laser processing of thin film coatings. A high average power CO2 laser was used to flood load the entire surface of each test sample. Thin film coatings of HfO2 and MgF2 on fused silica substrates were irradiated with power densities between 25 and 125 W/cm2.

Extensive pre- and post-test characterization revealed that some changes in the microstructure were observed, the coating optical thickness was reduced and short wavelength transmission was improved.

Author Information

Weber, AJ
Stewart, AF
Exarhos, GJ
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Developed by Committee: E13
Pages: 289–296
DOI: 10.1520/STP18566S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4