SYMPOSIA PAPER Published: 01 January 1988

Scatter Intensity Mapping of Laser-Illuminated Coating Defects


The ability to detect and locate defects nondestructively in multilayer optical coatings has been demonstrated using a video microscopy system. The system uses laser-excited scattering to illuminate defects responsible for laser-induced damage in multi-layer dielectric mirrors. So far, attempts to predict the particular defect that will initiate damage have been unsuccessful. Presently, intensity maps and contours can be generated by digitizing the video images of scattering from individual defects. These can reveal characteristic defect scatter features possibly related to damage probability, and they offer a means to follow the development of these features from incipient to catastrophic damage. Examples of defect scatter maps and intensity contours for a dielectric mirror will be presented and discussed.

Author Information

Moran, MB
Kuo, RH
Marrs, CD
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Developed by Committee: F01
Pages: 235–244
DOI: 10.1520/STP18557S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4