SYMPOSIA PAPER Published: 01 January 1988

Comparison of Frequency Response Characteristics of an Optical Scatterometer and a Mechanical Profilometer


The frequency response characteristics of an angle-resolved optical scatterometer and a mechanical profilometer are examined. The transfer function for the scatterometer is found to be constant within the spatial frequency bandwidth of the system. The mechanical profilometer is found to have a nonlinear, lowpass-like response. A computational model is used to examine the effects of the nonlinear stylus response on realistic surfaces.

Author Information

Wilson, SR
Al-Jumaily, GA
McNeil, JR
Price: $25.00
Contact Sales
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Developed by Committee: F01
Pages: 176–188
DOI: 10.1520/STP18549S
ISBN-EB: 978-0-8031-5032-4
ISBN-13: 978-0-8031-4477-4