Thin films of titanium oxide were deposited on the substrate of corning glass using radio frequency magnetron sputtering, and the films were then annealed at temperature of 500°C, 650°C, and 800°C for 1 h. For the purpose of film characterization, X-ray diffraction technique was used; for the study of surface topography and wettability, atomic force microscope and commercial goniometer were used; and for the study of optical properties, ultraviolet visual light spectra was used. The measurement of wettability was performed after the storage of samples for significant time in a dark room and after sunlight exposure for 5 h in ambient conditions. It was observed that the unannealed sample showed an amorphous phase, whereas samples annealed from 500°C to 650°C showed formation of anatase. At 650°C, the rutile phase appeared, and at 800°C, the conversion of anatase phase to rutile phase was observed. Titanium oxide films, after storage in a dark room, showed a hydrophobic nature, but after white light exposure for 5 h, superhydrophilic properties with a contact angle up to 4° was obtained. The results showed that with an increase in anatase phase, hydrophilicity was enhanced, but with the conversion to rutile phase, a significant increment in the values of the contact angle was observed from 4° to 27°. The films showed a highly transparent surface with around 85 % transparency.
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