The characteristics of oxynitride layers formation on titanium alloys in the process of controlled modification of titanium nitride by oxygen were determined. It was shown that by decreasing the oxygen partial pressure from 1 Pa to 0.0001 Pa, the content of oxynitride phase in the surface layer increases. It was determined that oxynitriding effect (ΔH) (the increase of surface microhardness of titanium alloys with regard to the corresponding nitriding) depends on the composition of titanium oxynitride and increases when its composition approaches equiatomic one.
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