The X-ray method is used extensively to determine the residual stress in bulk or thin film materials on the assumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the X-ray penetrating region. But the method cannot be used in textured films due to oscillations in ε -sin2 Ψ relation. In this paper, a new method is proposed for measuring residual stress in cubic films with any [hkl] fiber texture.
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