In this paper we describe the application of surface fabrication to the strain measurement in a nanometer scale with a scanning tunneling microscope (STM). In the electrical surface fabrication with the STM, hemispherical mounds whose radius and height were about 10 nm were created by applying a voltage pulse higher than 2.45 V between a gold STM tip and gold specimen. In the mechanical surface fabrication, indentations whose minimum depth was about 10 nm, were created by the contact of a conductive diamond tip with the gold specimen. The lattice of mounds or indentations was arranged in ten columns of ten rows at 45 nm pitch in the region of 450 × 450 nm. Comparing the two STM images before and after making a 50-nm-deep indentation on the lattice of small indentations, the displacement distribution was measured in the nanometer scale at each small indentation. Finally, strain distribution was calculated from the displacement distribution by using triangular elements.
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