Standard Historical Last Updated: Dec 31, 2010
ASTM F1467-99(2005)

Standard Guide for Use of an X-Ray Tester ([approximate]10 keV Photons) in Ionizing Radiation Effects Testing of Semiconductor Devices and Microcircuits

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Book of Standards Volume: 10.04
Developed by Subcommittee: F01.11
Pages: 18
DOI: 10.1520/F1467-99R05
ICS Code: 31.020