Standard Historical Last Updated: Jul 06, 2022
ASTM E493/E493M-11(2017)

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode

Standard Practice for Leaks Using the Mass Spectrometer Leak Detector in the Inside-Out Testing Mode
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Significance and Use

6.1 Methods A or B are useful in testing hermetically-sealed devices with internal volumes. Maximum acceptable leak rates have been established for microelectronic devices to assure performance characteristics will not be affected by in-leakage of air, water vapor or other contaminants over the projected life expected. Care must be taken to control the bombing pressure, bombing time and dwell time after bombing or the results can vary substantially.


1.1 This practice2 covers procedures for testing devices that are sealed prior to testing, such as semiconductors, hermetically enclosed relays, pyrotechnic devices, etc., for leakage through the walls of the enclosure. They may be used with various degrees of sensitivity (depending on the internal volume, the strength of the enclosure, the time available for preparation of test, and on the sorption characteristics of the enclosure material for helium). In general practice the sensitivity limits are from 10−10 to 10−6 Pa m3/s (10−9 standard cm3/s to 10−5 standard cm3/s at 0°C) for helium, although these limits may be exceeded by several decades in either direction in some circumstances.

1.2 Two test methods are described:

1.2.1 Test Method A—Test part preparation by bombing.

1.2.2 Test Method B—Test part preparation by prefilling.

1.3 Units—The values stated in either SI or std-cc/sec units are to be regarded separately as standard. The values stated in each system may not be exact equivalents: therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

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Book of Standards Volume: 03.03
Developed by Subcommittee: E07.08
Pages: 3
DOI: 10.1520/E0493_E0493M-11R17
ICS Code: 19.100