Standard Active Last Updated: Nov 13, 2018
ASTM D5127-13(2018)

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

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Book of Standards Volume: 11.01
Developed by Subcommittee: 02
Pages: 6
DOI: 10.1520/D5127-13R18
ICS Code: 13.060.25; 71.100.99