Standard Historical Last Updated: Oct 01, 2012
ASTM D5127-07

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries

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Details
Book of Standards Volume: 11.01
Developed by Subcommittee: D19.02
Pages: 5
DOI: 10.1520/D5127-07
ICS Code: 13.060.25; 71.100.99