ASTM E996 - 19

    Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

    Active Standard ASTM E996 | Developed by Subcommittee: E42.03

    Book of Standards Volume: 03.06


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    Significance and Use

    5.1 Include the experimental conditions under which spectra are taken in the “Experiment” section of all reports and publications.

    5.2 Identify any parameters that are changed between different spectra in the “Experiment” section of publications and reports, and include the specific parameters applicable to each spectrum in the figure caption.

    1. Scope

    1.1 Auger and X-ray photoelectron spectra are obtained using a variety of excitation methods, analyzers, signal processing, and digitizing techniques.

    1.2 This practice lists the desirable information that shall be reported to fully describe the experimental conditions, specimen conditions, data recording procedures, and data transformation processes.

    1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

    1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

    1.5 This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.


    2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.

    ASTM Standards

    E902 Practice for Checking the Operating Characteristics of X-Ray Photoelectron Spectrometers

    E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

    E995 Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

    E1078 Guide for Specimen Preparation and Mounting in Surface Analysis

    E1127 Guide for Depth Profiling in Auger Electron Spectroscopy

    ISO Standard

    ISO 18115-1:2013 Surface chemical analysis -- Vocabulary -- Part 1: General terms and terms used in spectroscopy


    ICS Code

    ICS Number Code 19.100 (Non-destructive testing)

    UNSPSC Code

    UNSPSC Code


    Referencing This Standard
    Link Here
    Link to Active (This link will always route to the current Active version of the standard.)

    DOI: 10.1520/E0996-19

    Citation Format

    ASTM E996-19, Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy, ASTM International, West Conshohocken, PA, 2019, www.astm.org

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