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This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
Formerly under the jurisdiction of Committee E42 on Surface Analysis, this practice was withdrawn in July 2017 in accordance with Section 10.6.3 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.
1.1 This practice outlines the necessary steps for the identification of elements in a given Auger spectrum obtained using conventional electron spectrometers. Spectra displayed as either the electron energy distribution (direct spectrum) or the first derivative of the electron energy distribution are considered.
1.2 This practice applies to Auger spectra generated by electron or X-ray bombardment of the specimen surface and can be extended to spectra generated by other methods such as ion bombardment.
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E673 Terminology Relating to Surface Analysis
E983 Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy
E984 Guide for Identifying Chemical Effects and Matrix Effects in Auger Electron Spectroscopy
E1523 Guide to Charge Control and Charge Referencing Techniques in X-Ray Photoelectron Spectroscopy
ISO StandardsISO17974:2002 Surface Chemical AnalysisHigh-Resolution Auger Electron SpectrometersCalibration of Energy Scales for Elemental and Chemical-State Analysis
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ASTM E827-08, Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017), ASTM International, West Conshohocken, PA, 2008, www.astm.orgBack to Top