| ||Format||Pages||Price|| |
|3||$52.00||  ADD TO CART|
This guide covers the information needed to characterize ion beams used in surface analysis.
Formerly under the jurisdiction of Committee E42 on Surface Analysis, this guide was withdrawn in January 2020 in accordance with Section 10.6.3 of the Regulations Governing ASTM Technical Committees, which requires that standards shall be updated by the end of the eighth year since the last approval date.
1.1 This guide covers the information needed to characterize ion beams used in surface analysis.
1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1,7). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.
1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.
2. Referenced Documents (purchase separately) The documents listed below are referenced within the subject standard but are not provided as part of the standard.
E673 Terminology Relating to Surface Analysis
E684 Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
|Link to Active (This link will always route to the current Active version of the standard.)|
ASTM E1577-11, Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020), ASTM International, West Conshohocken, PA, 2011, www.astm.orgBack to Top