|Committee D19 to Review Guide for Ultra-Pure Water
ASTM Committee D19 on Water invites all interested parties to participate in the upcoming five-year review process of D 5127, Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industry. D 5127 divides water into six types, depending on the linewidth of the electronic device. Currently, SEMI (Semiconductor Equipment and Materials International) references the ASTM protocol for use in laboratories that analyze semiconductor-grade water; SEMI relies on SEMI F63-0701 (Guidelines for Ultrapure Water Used in Semiconductor Processing) for guidance on water used in the manufacturing process.
The three main issues to be addressed during the review process are: 1) should the number of water types be changed, 2) should any of the maximum contamination levels be changed (and if so, by how much) and 3) should the laboratory or the fabrication plant or both be the targeted end user of the document?
For further technical information, contact task group chair Lynn Vanatta, Air Liquide Balazs, Dallas, Texas by June 1 (phone: 972/995-7541). D19 meets June 13-16 at the Millennium Maxwell House, Nashville, Tenn. For membership or meeting details, contact Leonard Morrissey, ASTM International (phone: 610/832-9719). //
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