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Sputtering Targets Is Topic of New Test Method

A task group of ASTM Subcommittee F01.17 on Sputter Metallization is developing a Test Method for Trace Metallic Impurities in High Purity Copper by High-Mass-Resolution Glow Discharge Mass Spectrometer.

“This test method will provide a standard method of analysis for high purity copper sputtering targets so that suppliers and purchasers of the material can have increased confidence in the quality of the material,” said Chuck Wickersham, R&D manager, Thin Films Group, Cabot Corporation, Columbus, Ohio.

The subcommittee initiated standard test methods for glow discharge mass spectroscopic (GDMS) analysis of copper because copper sputtering targets are becoming an important commercial product for the production of integrated circuits, explained Wickersham, who is chairing the task group sessions.

Wickersham said the standard will provide “a solid understanding of the precision and accuracy of the GDMS test method for high purity copper.” The method will help users to measure trace impurities by GDMS in copper with purity exceeding 99.99 percent.

The subcommittee seeks participation in this activity from professionals who are involved with the use of copper sputtering targets for the fabrication of integrated circuits.

Initiated in 1955, ASTM Committee F01 on Electronics has approximately 160 members who attend technical meetings twice a year to develop standards relevant to the electronics industry. Published in Volumes 10.04 and 10.05 of the Annual Book of ASTM Standards, the committee has jurisdiction over 204 standards that support the fabrication of materials, processes, controls, and equipment for electron devices.

For further technical information, contact Chuck Wickersham, R&D manager, Thin Films Group, Cabot Corporation, Columbus, Ohio (phone: 614/340-1848). Committee F01 meets Jan. 13 in Tampa, Fla., and Jun. 14-17 in Kansas City, Mo. For meeting or membership details, contact Scott Orthey, manager, Technical Committee Operations, ASTM International (phone: 610/832-9730). //

Copyright 2004, ASTM International