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    STP960

    Emerging Semiconductor Technology

    Gupta DC
    Published: 1987


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    Fourth in a series, STP 960 addresses new problems in semiconductor processing for the mid ‘80s. A total of 50 papers cover; Epitaxial Technology; Dielectrics and Junction Formation Techniques; Material Defects, Oxygen and Carbon in Silicon; Yield Enhancement and Contamination Control Aspects; Dopant Profiling Techniques and In-Process Measurements; and Fab Equipment: Automation and Reliability.



    Committee: F01

    DOI: 10.1520/STP960-EB

    ISBN-EB: 978-0-8031-5021-8

    ISBN-13: 978-0-8031-0459-4

    0-8031-0459-6
    978-0-8031-0459-4
    STP960-EB