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    An Automated Spreading Resistance Test Facility

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    An automated spreading resistance test facility has been designed and constructed at the Allentown Works of the Western Electric Co. This system has been shown to provide a rapid, semi-nondestructive, and reproducible measurement of epitaxial layer resistivity which can be used in a production environment. The system has the advantages of operator independence, well protected probes, and four-inch capability. Surface or in-depth measurements can be performed with on-line calculations of resistivity and impurity concentration. Cycle time is less than five seconds per measurement and system reproducibility is ± 1.3% (lS).


    Automated testing, epitaxial silicon, impurity concentration, resistivity, semiconductor materials, silicon, spreading resistance

    Author Information:

    White, James C.
    Western Electric Co., Inc., Allentown, Pa.

    Committee/Subcommittee: F01.15

    DOI: 10.1520/STP47397S