SYMPOSIA PAPER Published: 01 May 1967
STP45157S

1-5 The Contribution of Sputtering to Our Knowledge of Plasma-Surface Interactions

Source

When ions from a plasma or from an ion beam bombard a solid surface, many phenomena arise. Among those are the emission of electrons, chemical and catalytic surface reactions, lattice damage, surface migration of atoms, ion or neutralized ion scattering and reflection, ejection of neutral or excited or ionized lattice atoms (sputtering), desorption of surface layers, embedment of the bombarding ions, etc.

Author Information

Wehner, G., K.
Litton Systems, Inc.
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Details
Developed by Committee: C24
Pages: 3–5
DOI: 10.1520/STP45157S
ISBN-EB: 978-0-8031-6028-6
ISBN-13: 978-0-8031-6182-5