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    A Review of the Gravity-Settling Technique for Measuring Airborne Dust in Electron Device Processing Areas

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    The task group on gravity-settling techniques for airborne dust monitoring (Committee F-1 on Materials for Electron Tubes and Semiconductor Devices, Subcommittee X on Control of Contaminants, Section A on Airborne Particulate Matter) recommends that no attempt be made to write an ASTM test method in this area. The primary reasons for this recommendation are the inherent inaccuracies of the technique, the lengthy sampling times required, and the lack of correlation between gravity-settling data and the data obtained by other techniques. Comparative data supplied by independent investitors substantiate this latter reason.

    The technique does have some applicability, however, and is the most satisfactory method for obtaining a dust sample typical of the airborne dust depositing on a work surface or product component. For those having cause to apply it, the technique is outlined; and variations reported to the task group are described. Some representative data taken by participating companies in a range of environments are quoted.

    Author Information:

    Selby, E. E.
    Electronic Tube Division, Westinghouse Electric Corp., Elmira, N. Y.

    Committee/Subcommittee: F01.19

    DOI: 10.1520/STP44477S