SYMPOSIA PAPER Published: 01 January 1986
STP42104S

Air Cleanliness Validation for Cleanrooms

Source

Cleanroom air cleanliness validation is becoming increasingly important with the further miniaturization and susceptibility of products to airborne contamination. The rational for validation discussed, both for particle counting and for other testing. The documents covering cleanroom air validation are described, as is the general topic of “room classification.” Topics covered include validation methodology, testing modes, and room types. Factors affecting air cleanliness are discussed as well as other testing procedures to characterize cleanroom performance.

Author Information

Flannery, James, L.
ENV Services, Inc., King of Prussia, PA
Walcroft, James, P.
ENV Services, Inc., King of Prussia, PA
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Details
Developed by Committee: F21
Pages: 390–401
DOI: 10.1520/STP42104S
ISBN-EB: 978-0-8031-6046-0
ISBN-13: 978-0-8031-6200-6