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    Electrode Potential: A Tool for the Control of Materials and Processes in Electron Device Fabrication: I. EMF—Time Studies of Clean and Contaminated Platinum Electrodes

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    The performance of modern electronic devices may be significantly degraded by the presence of exceedingly small quantities of unknown and unwanted extraneous materials. In order to be able to produce reliable devices, it is necessary to exercise stringent control over the composition and processing of the materials used in device construction. At various stages in the fabrication process, end point tests are required to ensure that the material being processed has not become contaminated or otherwise degraded. A variety of techniques has been reported for the detection and control of some of the various classes of likely contaminants (1,2). This paper and the one which follows describe a new control technique in which the electrode potential of a metallic material (referred to some standard electrode in a specified electrolyte) may be used to characterize both the state of bulk purity of a metal and the condition of its surface and to monitor the reproducibility of both of these parameters from lot to lot of raw material.

    Author Information:

    Feder, D. O.
    Bell Telephone Laboratories, Murray Hill, N. J.

    Jacob, E. S.
    Bell Telephone Laboratories, Murray Hill, N. J.

    Committee/Subcommittee: F01.06

    DOI: 10.1520/STP41224S