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    Electron Beam Microanalyzer: A New Tool for Electron Device Development

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    Electron beam microanalysis has been one of the major advances in new analytical techniques developed during the last twelve years. About 1949 the first operating electron beam microanalyzer was constructed by Raymond Castaing (1), a student of Professor Andre Guinier at the Office Nationale d'Études et Recherches Aeronautiques in France. In the United States, development of microanalyzers began at the California Inst. of Technology and the Naval Research Laboratory. There are more than 40 instruments in operation throughout the world, not counting Russia. Commercial equipment can be obtained from eight different manufacturers (2). Short courses on its use have been given at Massachusetts Institute of Technology. A brief bibliography summarizing technical aspects was prepared for this course (3).

    Author Information:

    Hayes, J. S.
    Bell Telephone Laboratories, Inc., Laureldale, Pa

    Committee/Subcommittee: F01.12

    DOI: 10.1520/STP41222S