SYMPOSIA PAPER Published: 01 January 1976
STP39060S

Quantitative Auger Electron Spectroscopy with Elemental Sensitivity Factors

Source

An ultrahigh vacuum scanning Auger microprobe (SAM) system was used to obtain elemental sensitivity factors from selected metal alloys and oxides. The specimens were prepared to establish surface compositions equivalent to bulk concentration levels. Two-dimensional surface topographical and compositional SAM studies were made to determine the extent of impurity segregation or precipitation. Relative elemental sensitivity factors computed from published data were applied to ductile fracture surface measurements of Inconel and stainless steels. The metal alloy surface concentrations were compared to bulk concentrations. Relative elemental sensitivity factors were obtained from abraded surfaces of magnesium oxide, aluminum oxide, and silicon dioxide at primary beam energies of 3,5, and 10 keV. The results from fractured and abraded standards were compared to measurements made after sputtering with argon ions.

Author Information

Davis, LE
Analytical Laboratory, Physical Electronics Industries, Eden Prairie, Minn.
Joshi, A
Analytical Laboratory, Physical Electronics Industries, Eden Prairie, Minn.
Price: $25.00
Contact Sales
Related
Reprints and Permissions
Reprints and copyright permissions can be requested through the
Copyright Clearance Center
Details
Developed by Committee: E42
Pages: 52–57
DOI: 10.1520/STP39060S
ISBN-EB: 978-0-8031-5587-9
ISBN-13: 978-0-8031-0584-3